Multimedia for MEMS technologies and packaging education

MSTs (Micro-Systems Technologies) including ow subject MEMS (Micro-Electro-Mechanical Systems) represent a progressive area of electricall mechanicalhiomedical engineering. They allow the manufacture of miniature (micrometer level) electromechanical devices. These devices can both replace conventional devices and sub-systems at a fraction of their cost, with enhanced reliability and durability and, frequently open up entirely new applications where the sue and cost of devices based on conventional technology has prevented their use. Microsystems technology is a potentially disruptive technology. It is set to have enormous impact across the industrial spechum. Already the technology is sufficiently mature for MST based components and sub-systems to be available for incorporation into a wide range of existing equipment and systems. Its take up is set to take-off dramatically over the next five years, with substantial impact on the performance and competitiveness of many “every day” products and systems for industrial and consumer market. To supply this field with well-educated engineers with interdisciplinary knowledge, it is necessruy to teach them hasic sciences, technology, applications, and designing aspects (reliability, packaging, etc.) belonging to the topic of MSTs. Also the knowledge of user engineers should be upgraded-possibly in a form of distance learning. Conventional teaching methods, based on lectures, static written materials, laboratories, etc., has become rather difficult at all levels of MST education, recently. The main objective of the described project here is the development of a multimedia supported education material that teachesioverviews the theoretical background, manufacturing, as well as practical application of microelectronics, microelectro/opto/mechanical systems and their packaging technologies in order to prepare experts for designing next generation intelligent micro/nanointegrated systems in the new century. The new approach tries to exploit all advantages of multimedia computer aided teachmg not only for keeping the competitiveness but also in order to overcome the specific difficulties of the particular area. The modem educational software tool can secure up to date information, easy-tounderstand visualisation of the 3D MEMS structures and interactive examples of the subject. The course material will be available both on the internet and on CDs for the technical community, for other university professors for teaching, and also will continuously be developed. The paper will highlight the structure of the course material and demonstrate the animated examples.